JPS623407Y2 - - Google Patents
Info
- Publication number
- JPS623407Y2 JPS623407Y2 JP6367082U JP6367082U JPS623407Y2 JP S623407 Y2 JPS623407 Y2 JP S623407Y2 JP 6367082 U JP6367082 U JP 6367082U JP 6367082 U JP6367082 U JP 6367082U JP S623407 Y2 JPS623407 Y2 JP S623407Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor ring
- crucible
- heat shield
- susceptor
- inner diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 19
- 239000002775 capsule Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6367082U JPS58168570U (ja) | 1982-04-30 | 1982-04-30 | サセプタ−リング |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6367082U JPS58168570U (ja) | 1982-04-30 | 1982-04-30 | サセプタ−リング |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58168570U JPS58168570U (ja) | 1983-11-10 |
| JPS623407Y2 true JPS623407Y2 (en]) | 1987-01-26 |
Family
ID=30073765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6367082U Granted JPS58168570U (ja) | 1982-04-30 | 1982-04-30 | サセプタ−リング |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58168570U (en]) |
-
1982
- 1982-04-30 JP JP6367082U patent/JPS58168570U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58168570U (ja) | 1983-11-10 |
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